用制冷機(jī)低溫泵獲得清潔無(wú)油高真空
Production of Dry-Clean High-Vacuum with Refrigerator’s Cryopumps
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摘要: 制冷機(jī)低溫泵以其抽速大和無(wú)污染的特點(diǎn)，在各行各業(yè)得到了廣泛的應(yīng)用。文章介紹了制冷機(jī)低溫泵的工作原理、結(jié)構(gòu)和特點(diǎn)，以及在國(guó)外空間環(huán)境模擬設(shè)備上的使用情況。著重介紹了自主設(shè)計(jì)生產(chǎn)的制冷機(jī)低溫泵在國(guó)內(nèi)最大的空間環(huán)境模擬設(shè)備中調(diào)試和測(cè)量的情況，為獲得清潔無(wú)油高真空取得了良好的效果。Abstract: Refrigerator’s cryopumps is widely used because of its high pumping velocity and dry-clean nature. The theory, main structure and characteristics of the cryopump are introduced, together with its applications in the space environment simulators in foreign countries. The debugging and measurement using refrigerator’s cryopumps developed by our institute and used in KM6 in producing dry-clean high-vacuum are discussed in this paper.
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