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一種原位測量軌道原子氧效應的電阻型傳感器

A resistance-based sensor for the in-situ measurement of orbital atomic oxygen effects

  • 摘要: 為了發(fā)展原子氧環(huán)境及其效應飛行實驗技術，獲得在軌飛行實驗數(shù)據(jù)，北京衛(wèi)星環(huán)境工程研究所研制了一種小型、低成本的原子氧環(huán)境及其效應探測器。這種探測器的傳感器采用對原子氧敏感的導電材料制備電阻膜。電阻膜在飛行試驗中遭遇到原子氧剝蝕。在軌道飛行實驗中，通過原位監(jiān)測受原子氧剝蝕傳感器電阻值的變化，可以探測原子氧環(huán)境通量密度及被試驗樣品的原子氧剝蝕率。目前，采用電鍍法及紫外線光刻和金屬刻蝕微加工技術，已經(jīng)成功制備了原子氧通量密度鋨膜電阻傳感器。它可以測量原子氧的通量密度和積分通量，在400～500 km的軌道高度工作壽命約為1年。原子氧效應探測器是在石英玻璃基底上淀積銀膜，試驗材料膜涂覆在銀膜上。試驗材料膜在軌與原子氧反應而變得越來越薄，當其被完全剝蝕后，暴露出來的銀膜迅速被氧化，并且電阻變大。試驗材料膜的剝蝕時間可以確定，試驗材料的原子氧剝蝕率就可以計算出來。

     

    Abstract: A small, low-cost sensor for detecting atomic oxygen(AO) environment and its effects has been developed in Beijing Institute of Spacecraft Environment Engineering (BISEE) as a part of flight experiment techniques for AO environment and its effects. The sensor is based on an electrical resistance film made of conductive materials susceptible to AO. The AO-resistance osmium film is prepared by plating, UV-light etching and metal etching micro processing. It can be used to measure the flux and fluence of AO, with an operating life of about 1 year in the altitude of 400?500 km. The AO effect sensor is made of a quartz plate sputtered with silver film and coated on it a test film. It can be used to determine the AO erosion rate of the test film.

     

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