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超高真空環(huán)境下測試產(chǎn)品的放氣分析

Outgassing analysis of testing products in ultra-high vacuum

  • 摘要: 本文介紹了材料放氣的理論和模型，同時運(yùn)用費(fèi)克定理推導(dǎo)出圓柱型測試產(chǎn)品的理論放氣率，并介紹了測量放氣率的兩種常用方法：定容法和小孔流導(dǎo)法。文中指出了運(yùn)用小孔流導(dǎo)法存在的三個問題，并通過雙規(guī)流導(dǎo)（TGT）法解決了此類問題。

     

    Abstract: This paper discusses the theory and models of materials outgassing. Theoretical outgassing rates of typical (cylindrical) testing products are obtained by using Fick’s law. Two methods of measuring the outgassing rate are proposed, which are the constant volume method and the orifice throughput method. Three problems of the orifice throughput method are analyzed and solved by the twin gauge throughput (TGT) method.

     

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