近紫外輻照對OSR二次表面鏡導電性能影響研究

Influence of near ultraviolet irradiation on the electrical property of OSR second surface mirror

摘要: 文章研究了近紫外輻照試驗前后OSR二次表面鏡的電學性能變化規(guī)律，利用掃描電子顯微鏡（SEM）和X射線光電子能譜儀（XPS）對近紫外輻照后的涂層表面形貌和成分進行了分析，進而探討了近紫外輻照對OSR二次表面鏡導電性能變化機理。研究發(fā)現(xiàn)，OSR二次表面鏡的表面電阻率隨著紫外輻照度的增加而指數(shù)減小，氧空位吸附氧的解析、In-O鍵的斷裂和氧空位的增加是近紫外輻照OSR二次表面鏡表面電阻率降低、導電性能增強的主要原因。

Abstract: The influence of near ultraviolet radiation on the electrical property of OSR second surface mirror was studied experimentally and SEM and XPS were used to analyze the surface topography and its composition. The degradation mechanism of OSR electrical property was analyzed. From test and analysis, it is found that the surface resistivity of OSR decreases with near UV irradiance exponentially, and the resolution of adsorption oxygen in oxygen vacancy, rupture of In-O bond and increase of oxygen vacancy are the major causes for the improvement of electrical properties of OSR irradiated by near ultraviolet.

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