原子氧環(huán)境對石英晶體微量天平性能影響的分析

The effect of atomic oxygen on the properties and functions of quartz crystal microbalance

摘要: 隨著高可靠、長壽命航天器的發(fā)展，對在軌污染檢測的要求也越來越高。石英晶體微量天平是分子污染檢測的重要工具，為了分析了解原子氧對石英晶體微量天平的影響，文章用理論分析和試驗的方法對石英晶片在1×10²⁰ atom/cm²注量的原子氧輻照條件下的性能變化進行了研究。試驗證明，石英晶體微量天平在總注量10²⁰ atom/cm²量級的原子氧輻照后，其振蕩頻率和等效阻容感發(fā)生了一定變化，但仍具備污染傳感能力和頻率輸出能力，其功能不受影響。

Abstract: With the improvement of spacecraft in reliability and life, the in-flight contamination detection becomes more and more important. The influence of space atomic oxygen(AO) on the quartz crystal microbalance may be used for molecular contamination detection, therefore, the properties of quartz wafer after 1×10²⁰ cm^-2 AO irradiation are studied theoretically and experimentally in this paper. The test results show that the sample wafers retain their functions as contamination sensors and the ability for frequency output, despite slight changes in their oscillation frequency and electrical properties.

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