溶膠-凝膠法二氧化硅增透膜的制備與研究

Study on the SiO2 antireflective coatings prepared by sol-gel method

摘要: 利用正硅酸乙酯為前驅(qū)體，乙醇為溶劑，采用溶膠-凝膠法在玻璃基片上制備二氧化硅增透膜，并結(jié)合正交試驗(yàn)設(shè)計(jì)的方法，分析了試驗(yàn)的最佳原料配比以及影響二氧化硅增透膜性能的主要因素。用紫外-可見光分光光度計(jì)測(cè)定了二氧化硅增透膜的透光率。實(shí)驗(yàn)研究結(jié)果顯示：以鹽酸為催化劑在普通玻璃上制備的增透膜，可使透光率平均提高約3%；膜層結(jié)構(gòu)為非晶態(tài)；正硅酸乙酯和水的含量是主要影響因素。

Abstract: The silica antireflective films on normal glass substrates were prepared by the sol-gel method with TEOS as the precursor to the ethanol solvent. Orthogonal experimental method was used to determine the best ratio of raw materials and the main factors which affect the properties of coatings. The microstructure and transmittance properties of thin films were characterized by X-ray diffraction and UV-Vis spectrophotometer. The results show that taking hydrochloric acid as catalyst in the preparation of coatings on glass substrates, the average transmission rate can be increased by 3%, the structure is amorphous, TEOS and water content are the main factors.

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