薄膜測厚驗(yàn)證QCM質(zhì)量敏感性的方法研究

Determination of QCM mass sensitivity by measuring the thin-film thickness

摘要: 石英晶體微量天平（QCM）是測量氣相薄膜沉積質(zhì)量的精密儀器。QCM質(zhì)量和頻率的相互作用受到眾多不確定因素的影響，因此需要進(jìn)行驗(yàn)證以取得更為精確的結(jié)果。文章從石英晶片的基本理論出發(fā)，以薄膜測厚為基礎(chǔ)，研究了氣相沉積石英晶體微量天平差頻變化率和沉積厚度變化率成線性關(guān)系，闡述了線性關(guān)系是驗(yàn)證石英晶體微量天平的關(guān)鍵，并對測厚驗(yàn)證質(zhì)量敏感性的可行性進(jìn)行了分析。

Abstract: QCM is a precision mass detector for measuring the gas phase thin-film deposition. Because the correlation between frequency and mass can be affected by many uncertain factors, the sensitivity of QCM often plays an important role in securing accurate results. In this paper, from the QCM theory and the measurement of the thin-film thickness, the linear relation and the method for determination of the mass sensitivity of the gas phase thin-film QCM are discussed, where the linear relation is the key. The feasibility of the method based on the thickness measurement of the thin-film deposited on the sensor is discussed.

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