KM6低溫泵新型測溫系統(tǒng)研制

A new temperature measurement system for cryopumps in KM6

摘要: 低溫泵是KM6環(huán)境模擬器最主要的高真空獲得設(shè)備，其二級冷頭（板）的溫度變化對低溫泵的抽氣性能有直接的影響，因此對低溫泵內(nèi)部實施全面、準(zhǔn)確的溫度監(jiān)測對于保障低溫泵的穩(wěn)定、可靠運行具有重要的意義。文章詳細介紹了新研制的低溫泵測溫系統(tǒng)的軟、硬件結(jié)構(gòu)、測溫元器件的選型及安裝工藝、系統(tǒng)測試等內(nèi)容。該新型測溫系統(tǒng)已經(jīng)成功投入使用，能夠準(zhǔn)確地提供試驗過程中低溫泵內(nèi)部的溫度狀況，大大提高了低溫泵運行異常時的分析手段，為試驗的順利進行提供了有力的保障。

Abstract: Cryopump is the most important equipment to obtain high vacuum for KM6 The temperature variation on the second level cryohead has a direct effect on cryopump’s vacuum, therefore it is important to monitor the temperature variations inside cryopump extensively and accurately for stable operation of the pump. This paper discusses the development of related software and hardware, the selection of measurement components, their installations, and the system test. The new system has been used for thermal vacuum test successfully in providing useful data, as are essential for fault analyses.