寬量程真空規(guī)校準(zhǔn)裝置的性能研究

The development of a vacuum calibration device using vacuum comparison method

摘要: 文章研制了一種新的真空規(guī)校準(zhǔn)裝置，復(fù)合采用了動(dòng)態(tài)比對(duì)法、靜態(tài)比對(duì)法和靜態(tài)膨脹法，滿足了拓寬量程的需求。該裝置可以對(duì)量程在1×105～5×10-4 Pa范圍內(nèi)的各類真空規(guī)進(jìn)行校準(zhǔn)，具有結(jié)構(gòu)簡(jiǎn)單、操作方便、檢定效率高、實(shí)用性強(qiáng)的特點(diǎn)，尤其適用于大量常規(guī)校準(zhǔn)。裝置本底壓力、壓力穩(wěn)定度、靜態(tài)膨脹容積比等主要技術(shù)指標(biāo)符合國際標(biāo)準(zhǔn)化組織和國內(nèi)有關(guān)真空標(biāo)準(zhǔn)的規(guī)定。

Abstract: This paper proposes a self-developed standard device for vacuum calibration, which combines three methods, that is, the direct dynamic comparison method, the direct static comparison method, and the static expansion method, to meet the requirements of a wide range. The device can be used for calibrating various types of vacuum gauges ranging between 1×105 and 5×10-4 Pa. It features simple structure, easy operation and high efficiency that is specially suitable for a large number of routine calibrations, whose main technical specifications such as background pressure, pressure stability, and volume ratio in the static expansion method are in line with the requirements in the ISO and the domestic vacuum standards.