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超高真空設(shè)備的放氣分析（英文）

Outgassing analysis of ultra-high vacuum facility

  • 摘要: 文章介紹了超高真空設(shè)備放氣的理論，并給出兩種放氣模型：Schram吸附模型和吸附-擴(kuò)散模型；對(duì)設(shè)備的放氣理論值進(jìn)行了計(jì)算，并通過(guò)四極質(zhì)譜儀得出的殘余氣體質(zhì)譜圖分析出材料放氣的成分。

     

    Abstract: This paper discusses the outgassing theory and two outgassing models of materials, that is, Schram adsorption model and the adsorption-diffusion model based on Malev’s theory. The values of outgassing are calculated and outgassing of materials is analyzed by the residual gas spectrum obtained from quadrupole mass spectrometer (QMS) .

     

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