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氧化鋅半導(dǎo)體薄膜在原子氧探測中的應(yīng)用

ZnO film preparation and its application in atomic oxygen (AO) sensing

  • 摘要: 氧化鋅半導(dǎo)體薄膜是用于空間原子氧探測的一種敏感材料。采用脈沖激光沉積方法（PLD）在（001）取向的藍(lán)寶石基底上制備出了高質(zhì)量的氧化鋅薄膜，并在地面原子氧模擬設(shè)備中考察了其原子氧敏感特性。結(jié)果表明，氧化鋅薄膜對原子氧有較好的敏感特性，并且在受熱后導(dǎo)電性能可以恢復(fù)，滿足重復(fù)探測的要求。

     

    Abstract: High-quality ZnO thin films on C-axis sapphire (Al2O3) substrates were prepared by pulse laser deposition (PLD). The application of the films to AO sensing is investigated in a ground-based atomic oxygen simulation facility. The results show that the electrical conductivity of nano ZnO film decreases with the extent of AO exposure, and the conductance of the film can be recovered by heating for repeated use.

     

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